One of the most significant applications of MEMS structure is micromirrors. Millions of micromirrors can be implemented between two pans of conventional insulated glass, providing efficient transmission control and improved daylight distribution. Micromirror arrays implemented on large areas of the windows can control the amount and steer the daylight inside rooms in response to an applied voltage based on electrostatic actuation. Intelligent networked sensing systems can be used to collect information about the scenario in the room and environment conditions and feed them to an automated driving unit to deal with different conditions and situations. Fig.1, shows a schematic cross-section of an office equipped with a so-called “active window” with micromirrors dealing with different times and weather conditions. At noon: in winter, when the sun is at a high position, the micromirror arrays are opened (case a), and the office is fully illuminated and heated by solar radiation. In summer, the micromirror arrays are partially opened at a certain deviation angle (case b), providing better daylight distribution and reducing the room temperature by reflecting daylight. At duck: the micromirrors are opened to have full illumination (case d). However, the micromirror arrays can be partially opened to avoid the glare effect (case e) or fully closed, as in (case f).<br /> The miniaturization of micromirrors leads to improve mechanical stability, fast response, and enhanced lifetime. The domination of electrostatic force in micro-scale over inertial and gravitational forces improves the efficiency of using electrostatic force to actuate micromirrors. Furthermore, micromirrors are unresolved by human eyes; hence, the optical impression is undisturbed. Micromirrors are protected by the two panes of glass against dirt, dust, or any possible kinds of damage.<br />