The integrated circuit (IC or microchip) is a number of electronic elements on one small size chip of semiconductors material . ICs are utilized in all electronics equipment and have been revolutionized in the electronic circuits, mobile phones, and computers. The IC, primarily larger chips and smaller futures, the number of transistors in the IC are doubled each two years. Generally, when the size of IC shrinks, the capacity, cost decreases, and functionality increases, in addition to the power dissipation decreases and the speed is increased. The electronic circuits should be interconnected electrically and inseparably associated, therefore, the circuits are constructed by using many technologies, such as thick film technologies, thin film transistor or hybrid integrated circuits, the construction of IC as signal piece and is known monolithic IC.<br /><br />CMOS technology in the past years is witnessed a quicker development in electronic world. The basic reason of CMOS technology success, that the voltage which applied on the gate controls the overflow of current from the source terminal toward to the drain terminal or vice versa. The CMOS technology has physical limitations: leakage current and short length channel effect, these are led unmanageable to reliability and leakage power, therefore, the designers work hardly to solve these problems by regime the scaling of CMOS to nanoscale. When the scaling of CMOS is continuing into nanometer scale, it is happening challenges in electronic circuits. Scaling down of CMOS in nanometer has been decreased leakage current (OFF state). The leakage current at the normal conditions considers around 30-50% from the total power dissipation in devices. That is necessary to reduce the power dissipation. One of miniaturization is Nano Electro Mechanical Switch (NEMS), that have been started to find important place in the technology.<br /><br />